[PD2-5] Proximity Gettering of Heavy Metals by High Energy Ion Implantation

T. Kuroi、Y. Kawasaki、S. Komori、K. Fukumoto、M. Inuishi、K. Tsukamoto、H. Shinyashiki、T. Shingyoji (1.LSI Laboratory, Mitsubishi Electric Corporation、2.Central Research Institute, Mitsubishi Materials Corporation)

https://doi.org/10.7567/SSDM.1992.PD2-5