[PD2-L13] Raman Study of Stresses Caused by Intrinsic Getters Distribution in Device Structures

V. V. Bolotov, M. D. Efremov, I. Babanskaya, K. Schmalz (1.Institute of Semiconductor Physics)

https://doi.org/10.7567/SSDM.1992.PD2-L13