[PD3-9] Sensitivities of Laser/Microwave- and Conventional-DLTS for Defects in CZ Silicon

K. Katayama, A. Agarwal, Z. J. Radzimski, F. Shimura (1.North Carolina State University, Department of Materials Science & Engineering)

https://doi.org/10.7567/SSDM.1992.PD3-9