[PD3-9] Sensitivities of Laser/Microwave- and Conventional-DLTS for Defects in CZ Silicon

K. Katayama、A. Agarwal、Z. J. Radzimski、F. Shimura (1.North Carolina State University, Department of Materials Science & Engineering)

https://doi.org/10.7567/SSDM.1992.PD3-9