Characterization of GeSi/Si Layer Structure by CBED

G. SHAO; Z. YANG; B. L. WEISS

doi:https://doi.org/10.7567/SSDM.1992.PD3-L11

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜 1992年8月28日
Tsukuba Center Building, Tsukuba, Japan

[PD3-L11] Characterization of GeSi/Si Layer Structure by CBED

G. SHAO、Z. YANG、B. L. WEISS (1.Department of Materials Science and Engineering Department of Electronic and Electrical Engineering University of Surrey)

https://doi.org/10.7567/SSDM.1992.PD3-L11

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