[PD4-1] Lower-Submicron Patterning Process for BiSrCaCuO High-Tc Superconducting Thin Films

Shuji FUJIWARA、Ryokan YUASA、Hiroaki FURUKAWA、Masao NAKAO、Shigeo SUZUKI (1.SANYO Tsukuba Research Center)

https://doi.org/10.7567/SSDM.1992.PD4-1