A Novel Contactless and Nondestructive Measurement Method of Surface Recombination Velocity on Silicon Surfaces by Photoluminescence

Toshiya SAITOH; Youichiro NISHIMOTO; Takayuki SAWADA; Hideki HASEGAWA

doi:https://doi.org/10.7567/SSDM.1992.S-V-5

[S-V-5] A Novel Contactless and Nondestructive Measurement Method of Surface Recombination Velocity on Silicon Surfaces by Photoluminescence

Toshiya SAITOH, Youichiro NISHIMOTO, Takayuki SAWADA, Hideki HASEGAWA (1.Research Center for Interface Quantum Electronics and Department of Electrical Engineering Hokkaido University)

https://doi.org/10.7567/SSDM.1992.S-V-5

1992 International Conference on Solid State Devices and Materials

[S-V-5] A Novel Contactless and Nondestructive Measurement Method of Surface Recombination Velocity on Silicon Surfaces by Photoluminescence