The Japan Society of Applied Physics

[A-0-2] Past, Present and Future of Si LSI - Reminiscences about a Single MOSFET and Prospects for Multifunctional Si-Subsystems in the 21st Century

Minoru NAGATA (1.Corporate Technology Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1993.A-0-2