Investigations on Hole Trapping and Detrapping Phenomena in Thin Oxide Films

Quazi Deen Mohd Khosru; Naoki Yasuda; Kenji Taniguchi; Chihiro Hamaguchi

doi:https://doi.org/10.7567/SSDM.1993.A-3-4

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜 1993年9月1日
Makuhari Messe, Chiba, Japan

[A-3-4] Investigations on Hole Trapping and Detrapping Phenomena in Thin Oxide Films

Quazi Deen Mohd Khosru、Naoki Yasuda、Kenji Taniguchi、Chihiro Hamaguchi (1.Department of Electronic Engineering, Osaka University、2.Toshiba Corporation, ULSI Research Center)

https://doi.org/10.7567/SSDM.1993.A-3-4

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