Direct Observation of Channel-Doping-Dependent Reverse Short Channel Effect Using Decoupled C-V Technique

C. C. -H. Hsu; J. C. Guo; M. H. Kuo

doi:https://doi.org/10.7567/SSDM.1993.C-1-5

[C-1-5] Direct Observation of Channel-Doping-Dependent Reverse Short Channel Effect Using Decoupled C-V Technique

C. C. -H. Hsu、J. C. Guo、M. H. Kuo (1.Department of Electrical Engineering, National Tsing-Hua University、2.Department of Electronics Engineering, National Chiao-Tung University、3.Electronics Research & Service Organization Industrial Technology Research Institute)

https://doi.org/10.7567/SSDM.1993.C-1-5

1993 International Conference on Solid State Devices and Materials

[C-1-5] Direct Observation of Channel-Doping-Dependent Reverse Short Channel Effect Using Decoupled C-V Technique