Direct Observation of Channel-Doping-Dependent Reverse Short Channel Effect Using Decoupled C-V Technique

C. C. -H. Hsu; J. C. Guo; M. H. Kuo

doi:https://doi.org/10.7567/SSDM.1993.C-1-5

[C-1-5] Direct Observation of Channel-Doping-Dependent Reverse Short Channel Effect Using Decoupled C-V Technique

C. C. -H. Hsu, J. C. Guo, M. H. Kuo (1.Department of Electrical Engineering, National Tsing-Hua University, 2.Department of Electronics Engineering, National Chiao-Tung University, 3.Electronics Research & Service Organization Industrial Technology Research Institute)

https://doi.org/10.7567/SSDM.1993.C-1-5

1993 International Conference on Solid State Devices and Materials

[C-1-5] Direct Observation of Channel-Doping-Dependent Reverse Short Channel Effect Using Decoupled C-V Technique