[C-4-4] Atomic Layer Modification by Low Energy Electron Beam to Control the GaAs/CaF2 Heterointerface

Akira IZUMI, Kazuo TSUTSUI, Seijiro FURUKAWA (1.Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1993.C-4-4