[C-6-7] Phosphorus Doping by Electron Cyclotron Resonance Plasma for Large Area Poly-Si TFTs

Hiroaki KAKINUMA, Mikio MOHRI, Taiji TSURUOKA (1.Research Laboratory, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1993.C-6-7