[D-1-3] Substrate Nitridation Effects on GaN Grown on GaAs Substrates by Molecular Beam Epitaxy Using RF-Radical Nitrogen Source

Akihiko KIKUCHI、Hiroyuki HOSHI、Katsumi KISHINO (1.Dept. of Electrical & Electronics Engineering, Sophia University)

https://doi.org/10.7567/SSDM.1993.D-1-3