Threading Dislocations in GaAs on Pre-Patterned Si and in Post-Patterned GaAs on Si

M. Tamura; T. Saitoh; J. Palmer; T. Yodo; J. Kasai; A. Nishida

doi:https://doi.org/10.7567/SSDM.1993.D-2-3

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜 1993年9月1日
Makuhari Messe, Chiba, Japan

[D-2-3] Threading Dislocations in GaAs on Pre-Patterned Si and in Post-Patterned GaAs on Si

M. Tamura、T. Saitoh、J. Palmer、T. Yodo、J. Kasai、A. Nishida (1.Optoelectronics Technology Research Laboratory、2.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1993.D-2-3

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