[D-7-3] Micron-Size Optical Waveguide for Optoelectronic Intergrated Circuits T. Nagata、T. Tanaka、K. Miyake、H. Kurotaki、S. Yokoyama、M. Koyanagi (1.Research Center for Integrated Systems, Hiroshima University) https://doi.org/10.7567/SSDM.1993.D-7-3