[D-8-5] Large-Area MOVPE Growth of an n-InGaP/InGaAs/GaAs HEMT Structure Using TBP

H. Ochimizu、T. Kikkawa、S. Kuroda、K. Kasai、J. Komeno (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.1993.D-8-5