[LC-13] AlGaAs/InGaAs/GaAs Single Electron Transistors Fabricated by Ga Focused Ion Beam Implantation

Toshimasa Fujisawa、Yoshiro Hirayama、Seigo Tarucha (1.NTT Basic Research Laboratories)

https://doi.org/10.7567/SSDM.1993.LC-13