[PB-2-3] Uniform Performance TFT with Excimer Laser Annealing of Solid Phase Crystallized Poly-Si

N. Kodama, H. Tanabe, K. Sera, K. Hamada, S. Saitoh, F. Okumura, K. Ikeda (1.ULSI Device Development Laboratories, NEC Corporation, 2.Functional Device Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1993.PB-2-3