[PB-2-3] Uniform Performance TFT with Excimer Laser Annealing of Solid Phase Crystallized Poly-Si

N. Kodama、H. Tanabe、K. Sera、K. Hamada、S. Saitoh、F. Okumura、K. Ikeda (1.ULSI Device Development Laboratories, NEC Corporation、2.Functional Device Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1993.PB-2-3