Wettability of Silicon Oxide by Poly-Crystalline Silicon

Mitsutoshi MIYASAKA; Wataru ITOH; Tadakazu KOMATSU; Ichio YUDASAKA; Hiroyuki OHSHIMA

doi:https://doi.org/10.7567/SSDM.1993.PC-1-10

[PC-1-10] Wettability of Silicon Oxide by Poly-Crystalline Silicon

Mitsutoshi MIYASAKA、Wataru ITOH、Tadakazu KOMATSU、Ichio YUDASAKA、Hiroyuki OHSHIMA (1.SEIKO EPSON CORPORATION TFT/MIM Research Laboratory Material Analysis and Computing Center Production Engineering Department)

https://doi.org/10.7567/SSDM.1993.PC-1-10

1993 International Conference on Solid State Devices and Materials

[PC-1-10] Wettability of Silicon Oxide by Poly-Crystalline Silicon