[PC-1-2] A New Silicon Source Material for SiO2 CVD -Hydrogen Free Organic Silicon-

Osamu SUGIURA, Hitoshi TANIGUCHI, Werner GASSER, Masakiyo MATSUMURA (1.Dept. of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1993.PC-1-2