[PC-1-25] Medium Energy Ion Spectroscopy of Ultra-Thin As+ Implanted Layers: The Effect of Reversible Site Change of As Atoms

Zbigniew J. RADZIMSKI、Shin YOKOYAMA、Takeshi WATANABE、Kensaku ISHIBASHI、Masataka HIROSE (1.Research Center for Integrated Systems, Hiroshima University、2.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1993.PC-1-25