[PC-1-25] Medium Energy Ion Spectroscopy of Ultra-Thin As+ Implanted Layers: The Effect of Reversible Site Change of As Atoms

Zbigniew J. RADZIMSKI, Shin YOKOYAMA, Takeshi WATANABE, Kensaku ISHIBASHI, Masataka HIROSE (1.Research Center for Integrated Systems, Hiroshima University, 2.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1993.PC-1-25