[PC-1-5] A New Portrayal of Oxidation of Undoped Polycrystalline Silicon Film for Short Duration

P. W. Wang, H. P. Su, M. S. Feng, H. C. Cheng (1.Department of Electronics Engineering and Institute of Electronics, National Nano Device Laboratory, 2.Institute of Materials Science and Engineering, National Chiao Tung University)

https://doi.org/10.7567/SSDM.1993.PC-1-5