Three Dimensional Improvement of Field Oxidation by Using High Pressure Oxidation for the Gigabit Density Field Isolation

[PC-1-6] Three Dimensional Improvement of Field Oxidation by Using High Pressure Oxidation for the Gigabit Density Field Isolation

Simon DELEONIBUS, Sang S. KIM (1.LETI (CEA-Technologies Avancees)- Dept de Microelectronique, 2.GASONICS/IPC-HiPOx Products-)