[PC-1-6] Three Dimensional Improvement of Field Oxidation by Using High Pressure Oxidation for the Gigabit Density Field Isolation

Simon DELEONIBUS、Sang S. KIM (1.LETI (CEA-Technologies Avancees)- Dept de Microelectronique、2.GASONICS/IPC-HiPOx Products-)

https://doi.org/10.7567/SSDM.1993.PC-1-6