[PC-2-10] Atomic-Order Planarization of Ultra-Thin SiO2/Si(001) Interfaces

Masaaki NIWA, Takashi KOUZAKI, Kenji OKADA, Robert SINCLAIR (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd., 2.Matsushita Technoresearch Inc., 3.Materials Science and Engineering, Stanford University)

https://doi.org/10.7567/SSDM.1993.PC-2-10