[PC-2-10] Atomic-Order Planarization of Ultra-Thin SiO2/Si(001) Interfaces

Masaaki NIWA、Takashi KOUZAKI、Kenji OKADA、Robert SINCLAIR (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.、2.Matsushita Technoresearch Inc.、3.Materials Science and Engineering, Stanford University)

https://doi.org/10.7567/SSDM.1993.PC-2-10