Hydrogenation Effects on the Specific Contact Resistivity of Al(1%Si) and TiSi2 Contact to the Polysilicon

Wen Luh Yang; Tan Fu Lei; Chung Len Lee

doi:https://doi.org/10.7567/SSDM.1993.PC-2-14

[PC-2-14] Hydrogenation Effects on the Specific Contact Resistivity of Al(1%Si) and TiSi2 Contact to the Polysilicon

Wen Luh Yang, Tan Fu Lei, Chung Len Lee (1.Institute and Department of Electrical Engineering, Feng Chia University, 2.Institute and Department of Electronics, National Chiao Tung University)

https://doi.org/10.7567/SSDM.1993.PC-2-14

1993 International Conference on Solid State Devices and Materials

[PC-2-14] Hydrogenation Effects on the Specific Contact Resistivity of Al(1%Si) and TiSi2 Contact to the Polysilicon