[PC-2-2] PN Junction Formation by Two Step Annealings in N-Doped CZ-SI Crystals

C. S. Chen, C. F. Li, L. B. Li, D. L. Que (1.Department of Physics, Wuhan University, 2.Semiconductor Materials Institute, Zhejiang University)

https://doi.org/10.7567/SSDM.1993.PC-2-2