[PC-2-5] Modification of Silicon Surface Produced by Electric Field Enhanced Oxidation Through Native Oxide

Yasunori EJIRI, Masatoshi YASUTAKE, Takeo HATTORI (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology, 2.Scientific Instruments Division, Development Department, Seiko Instruments Inc, Takatsuka Unit)

https://doi.org/10.7567/SSDM.1993.PC-2-5