Modification of Silicon Surface Produced by Electric Field Enhanced Oxidation Through Native Oxide

Yasunori EJIRI; Masatoshi YASUTAKE; Takeo HATTORI

doi:https://doi.org/10.7567/SSDM.1993.PC-2-5

[PC-2-5] Modification of Silicon Surface Produced by Electric Field Enhanced Oxidation Through Native Oxide

Yasunori EJIRI, Masatoshi YASUTAKE, Takeo HATTORI (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology, 2.Scientific Instruments Division, Development Department, Seiko Instruments Inc, Takatsuka Unit)

https://doi.org/10.7567/SSDM.1993.PC-2-5

1993 International Conference on Solid State Devices and Materials

[PC-2-5] Modification of Silicon Surface Produced by Electric Field Enhanced Oxidation Through Native Oxide