[PC-2-8] Epitaxially Grown Microcrystals in Thermally Oxidized Amorphous SiO2 Film on Si(001) Wafers

Isao TAKAHASHI, Kouki NAKANO, Jimpei HARADA, Takayoshi SHIMURA, Masataka UMENO (1.Department of Applied Physics, Nagoya University, 2.Department of Precision Engineering, Osaka University)

https://doi.org/10.7567/SSDM.1993.PC-2-8