Epitaxially Grown Microcrystals in Thermally Oxidized Amorphous SiO2 Film on Si(001) Wafers

Isao TAKAHASHI; Kouki NAKANO; Jimpei HARADA; Takayoshi SHIMURA; Masataka UMENO

doi:https://doi.org/10.7567/SSDM.1993.PC-2-8

[PC-2-8] Epitaxially Grown Microcrystals in Thermally Oxidized Amorphous SiO2 Film on Si(001) Wafers

Isao TAKAHASHI、Kouki NAKANO、Jimpei HARADA、Takayoshi SHIMURA、Masataka UMENO (1.Department of Applied Physics, Nagoya University、2.Department of Precision Engineering, Osaka University)

https://doi.org/10.7567/SSDM.1993.PC-2-8

1993 International Conference on Solid State Devices and Materials

[PC-2-8] Epitaxially Grown Microcrystals in Thermally Oxidized Amorphous SiO2 Film on Si(001) Wafers