Transport Properties of Modulation Doped Structures Grown by Molecular Beam Epitaxy after Focused Ion Beam Implantation

Masayuki ITOH; Tadashi SAKU; Toshimasa FUJISAWA; Yoshiro HIRAYAMA; Seigo TARUCHA

doi:https://doi.org/10.7567/SSDM.1993.PD-2-2

[PD-2-2] Transport Properties of Modulation Doped Structures Grown by Molecular Beam Epitaxy after Focused Ion Beam Implantation

Masayuki ITOH, Tadashi SAKU, Toshimasa FUJISAWA, Yoshiro HIRAYAMA, Seigo TARUCHA (1.NTT Basic Research Laboratories, 2.NTT Opto-Electronics Laboratories)

https://doi.org/10.7567/SSDM.1993.PD-2-2

1993 International Conference on Solid State Devices and Materials

[PD-2-2] Transport Properties of Modulation Doped Structures Grown by Molecular Beam Epitaxy after Focused Ion Beam Implantation