[PD-2-2] Transport Properties of Modulation Doped Structures Grown by Molecular Beam Epitaxy after Focused Ion Beam Implantation

Masayuki ITOH、Tadashi SAKU、Toshimasa FUJISAWA、Yoshiro HIRAYAMA、Seigo TARUCHA (1.NTT Basic Research Laboratories、2.NTT Opto-Electronics Laboratories)

https://doi.org/10.7567/SSDM.1993.PD-2-2