The Japan Society of Applied Physics

[PD-3-3] Dry Sulfur Passivation of GaAs Surface Using ArF Excimer Laser with H2S

M. Totsuka、N. Yoshida、S. Chichibu、T. Akane、H. Uji、H. Higuchi、S. Matsumoto (1.Department of Electrical Engineering, Faculty of Science and Technology, Keio University、2.Bentec Corporation)

https://doi.org/10.7567/SSDM.1993.PD-3-3