Dry Sulfur Passivation of GaAs Surface Using ArF Excimer Laser with H2S

M. Totsuka; N. Yoshida; S. Chichibu; T. Akane; H. Uji; H. Higuchi; S. Matsumoto

doi:https://doi.org/10.7567/SSDM.1993.PD-3-3

[PD-3-3] Dry Sulfur Passivation of GaAs Surface Using ArF Excimer Laser with H2S

M. Totsuka、N. Yoshida、S. Chichibu、T. Akane、H. Uji、H. Higuchi、S. Matsumoto (1.Department of Electrical Engineering, Faculty of Science and Technology, Keio University、2.Bentec Corporation)

https://doi.org/10.7567/SSDM.1993.PD-3-3

1993 International Conference on Solid State Devices and Materials

[PD-3-3] Dry Sulfur Passivation of GaAs Surface Using ArF Excimer Laser with H2S