Novel Step Height Reduction Phenomenon during Alkyl-Desorption Limited Atomic Layer Epitaxial Growth on Vicinal Substrate

S. Goto; J. Ishizaki; T. Fukui; H. Hasegawa

doi:https://doi.org/10.7567/SSDM.1993.PD-3-7

[PD-3-7] Novel Step Height Reduction Phenomenon during Alkyl-Desorption Limited Atomic Layer Epitaxial Growth on Vicinal Substrate

S. Goto、J. Ishizaki、T. Fukui、H. Hasegawa (1.Department of Electrical Engineering and Research Center for Interface Quantum Electronics, Hokkaido University)

https://doi.org/10.7567/SSDM.1993.PD-3-7

1993 International Conference on Solid State Devices and Materials

[PD-3-7] Novel Step Height Reduction Phenomenon during Alkyl-Desorption Limited Atomic Layer Epitaxial Growth on Vicinal Substrate