[PD-3-7] Novel Step Height Reduction Phenomenon during Alkyl-Desorption Limited Atomic Layer Epitaxial Growth on Vicinal Substrate
S. Goto, J. Ishizaki, T. Fukui, H. Hasegawa
(1.Department of Electrical Engineering and Research Center for Interface Quantum Electronics, Hokkaido University)
https://doi.org/10.7567/SSDM.1993.PD-3-7
