[PD-3-9] Realization of High-Concentration p-Type Layers in Zn-Doped InAlP by Substrate Misorientation

Mariko Suzuki、Kazuhiko Itaya、Masaki Okajima (1.Research and Development Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1993.PD-3-9