[PD-5-3] Fabrication of GaAs Microstructures on CaF2 by Selective Growth Method Using a Focused Electron Beam

Koji KAWASAKI, Kazuo TSUTSUI, Seijiro FURUKAWA (1.Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1993.PD-5-3