Selforganizing Growth of Nanometer Mesa Structures on (100)-Silicon Substrates

H. Gossner; E. Hammerl; F. Wittmann; W. Hansch; H. Baumgartner; I. Eisele; T. Heinzel; H. Lorenz

doi:https://doi.org/10.7567/SSDM.1993.S-I-1-4

[S-I-1-4] Selforganizing Growth of Nanometer Mesa Structures on (100)-Silicon Substrates

H. Gossner, E. Hammerl, F. Wittmann, W. Hansch, H. Baumgartner, I. Eisele, T. Heinzel, H. Lorenz (1.Universitat der Bundeswehr Munchen, 2.Ludwig-Maximilian-Universitat Munchen)

https://doi.org/10.7567/SSDM.1993.S-I-1-4

1993 International Conference on Solid State Devices and Materials

[S-I-1-4] Selforganizing Growth of Nanometer Mesa Structures on (100)-Silicon Substrates