[S-I-2-4] Growth, Characterization and Device Fabrication of Boron Delta Doped Structures by Si-MBE M. R. Sardela Jr.、H. Radpisheh、L. Hultman、G. V. Hansson (1.Department of Physics, Linkoping University) https://doi.org/10.7567/SSDM.1993.S-I-2-4