[S-I-3-1] Si1-xGex Epitaxial Growth Using UHV-CVD and Its Device Applications

Toru Tatsumi, Ken-ichi Aketagawa, K. Miyanaga, Masayuki Hiroi (1.Microelectronics Labs. NEC Corporation, 2.ANELVA Corporation)

https://doi.org/10.7567/SSDM.1993.S-I-3-1