[S-I-3-1] Si1-xGex Epitaxial Growth Using UHV-CVD and Its Device Applications Toru Tatsumi、Ken-ichi Aketagawa、K. Miyanaga、Masayuki Hiroi (1.Microelectronics Labs. NEC Corporation、2.ANELVA Corporation) https://doi.org/10.7567/SSDM.1993.S-I-3-1
