Gas-Source Molecular Beam Epitaxial Growth of Crescent-Shaped SiGe Quantum Wire Arrays on a V-Groove Patterned Si Substrate

[S-I-3-2] Gas-Source Molecular Beam Epitaxial Growth of Crescent-Shaped SiGe Quantum Wire Arrays on a V-Groove Patterned Si Substrate

N. Usami, T. Mine, S. Fukatsu, Y. Shiraki (1.Research Center for Advanced Science and Technology (RCAST), The University of Tokyo)