[S-I-4-1] Low-Temperature Epitaxial Growth of Si/Si1-xGex/Si Heterostructure by CVD

Junichi MUROTA, Yasuji SAWADA, Shoichi ONO (1.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1993.S-I-4-1