[S-I-5-6] Optical Properties of Dry Etched Si/Si1-xGex Heterostructures

Y. S. Tang, C. D. W. Wilkinson, D. W. Smith, T. E. Whall, E. H. C. Parker (1.Nanoelectronics Research Centre, Department of Electronics and Electrical Engineering, University of Glasgow, 2.Department of Physics, University of Warwick)

https://doi.org/10.7567/SSDM.1993.S-I-5-6